3D FinFET model

Dear COMSOL users
I have been trying to make a simple 3Dimensional FinFet model by using semiconductor module(comsol 5.0). After computing, I am getting the following errors. If you have any idea to find a solution, please let me know...

Undefined value found.
- Detail: Undefined value found in the equation residual vector.
There are 38 degrees of freedom giving NaN/Inf in the vector for the variable comp1.Ne.
at coordinates: (1.89791e-008,-4.70492e-008,-2.10694e-010), (1.88505e-008,-4.71681e-008,2.64803e-010), (2.51508e-008,-5.02182e-008,-5.59956e-009), (2.52283e-008,-4.98438e-008,-5.54877e-009), (2.37709e-008,-4.86442e-008,-1.69843e-010), ...
There are 30 degrees of freedom giving NaN/Inf in the vector for the variable comp1.Ph.
at coordinates: (1.89791e-008,-4.70492e-008,-2.10694e-010), (1.88505e-008,-4.71681e-008,2.64803e-010), (2.51508e-008,-5.02182e-008,-5.59956e-009), (2.52283e-008,-4.98438e-008,-5.54877e-009), (2.37709e-008,-4.86442e-008,-1.69843e-010), ...